Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System

In recent years, tissue engineering with mechanical stimulation has received considerable attention. order to manipulate samples, there is a need for electromechanical devices, such as constant-force actuators, integrated deflection measurement. this paper, we present an electrostatic actuator allowing the generation of constant force and simultaneous displacement measurement intended characterization. The system combines comb drive structure spring system. A theoretical overview both subsystems, well actual measurements demonstrator system, are provided. Based on silicon-on-insulator technology, fabrication process moveable extending tip shown. Additionally, compare results simulations. Our reaches 79 ± 2 ?N at operating voltage 25 V over range approximately 40 ?m, possibility adjusting by changing demonstrated.